000 00665nam a2200241Ia 4500
005 20260121112647.0
008 7784 260114s9999 xx 000 0 eng d
020 _a9781860949203
037 _aEBOOK
040 _aCRL
_beng
_cCRL
041 _aeng
_2eng
084 _qCRL
100 _aGaura Elena, Newman Robert & Kraft Michael
_9961191
245 0 _aSmart Mems and Sensor Systems
260 _bICP
260 _bWorld Scientific
260 _c2006
650 _aNanotechnology & Nanoscience
_9961192
856 _uhttps://www.worldscientific.com/worldscibooks/10.1142/p355#t=toc
942 _cEBOOK
999 _c1545084
_d1545084