| 000 | 00677nam a2200241Ia 4500 | ||
|---|---|---|---|
| 005 | 20260121112650.0 | ||
| 008 | 7817 260114s9999 xx 000 0 eng d | ||
| 020 | _a9781860949098 | ||
| 037 | _aEBOOK | ||
| 040 |
_aCRL _beng _cCRL |
||
| 041 |
_aeng _2eng |
||
| 084 | _qCRL | ||
| 100 |
_aCheung Rebecca _9961257 |
||
| 245 | 0 | _aSilicon Carbide Microelectromechanical Systems for Harsh Environments | |
| 260 | _bICP | ||
| 260 | _bWorld Scientific | ||
| 260 | _c2006 | ||
| 650 |
_aNanotechnology & Nanoscience _9961258 |
||
| 856 | _uhttps://www.worldscientific.com/worldscibooks/10.1142/p426#t=toc | ||
| 942 | _cEBOOK | ||
| 999 |
_c1545117 _d1545117 |
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