000 00677nam a2200241Ia 4500
005 20260121112650.0
008 7817 260114s9999 xx 000 0 eng d
020 _a9781860949098
037 _aEBOOK
040 _aCRL
_beng
_cCRL
041 _aeng
_2eng
084 _qCRL
100 _aCheung Rebecca
_9961257
245 0 _aSilicon Carbide Microelectromechanical Systems for Harsh Environments
260 _bICP
260 _bWorld Scientific
260 _c2006
650 _aNanotechnology & Nanoscience
_9961258
856 _uhttps://www.worldscientific.com/worldscibooks/10.1142/p426#t=toc
942 _cEBOOK
999 _c1545117
_d1545117