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| 020 | _a9781848161320 | ||
| 037 | _aEBOOK | ||
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_aGonzalez-Elipe A R Et Al _9963003 |
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| 245 | 0 | _aLow Energy Ion Assisted Film Growth | |
| 260 | _bICP | ||
| 260 | _bWorld Scientific | ||
| 260 | _c2003 | ||
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_aPhysics _9963004 |
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