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_aCraievich Aldo Et Al _9969826 |
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| 245 | 0 | _aMicrolithography: High Integration in Microelectronics - Proceedings of the First Workshop | |
| 260 | _bWorld Scientific | ||
| 260 | _bWSPC | ||
| 260 | _c1990 | ||
| 650 |
_aPhysics _9969827 |
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| 856 | _uhttps://www.worldscientific.com/worldscibooks/10.1142/1034#t=toc | ||
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