000 00643nam a2200253Ia 4500
005 20260121114133.0
008 008 260114s9999 xx 000 0 eng d
020 _a9783527818655
037 _aEBOOK
040 _aCRL
040 _beng
040 _cCRL
041 _2eng
041 _aeng
084 _qCRL
100 _aHideki Matsumura
_9971311
245 0 _aCatalytic Chemical Vapor Deposition - Technologyand Applications of Cat-CVD
260 _bWiley
260 _c2019
856 _uhttps://onlinelibrary.wiley.com/doi/book/10.1002/9783527818655
942 _cEBOOK
999 _c1550566
_d1550566