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037 _aEBOOK
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040 _beng
040 _cCRL
041 _2eng
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084 _qCRL
100 _aDahoo
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245 0 _aApplications and Metrology at Nanometer-Scale 2: Measurement Systems, Quantum Engineering and RBDO Method
260 _bIEEE
856 _uhttps://ieeexplore.ieee.org/servlet/opac?bknumber=10523206
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