| 000 | 00987nam a2200313Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20220912145118.0 | ||
| 006 | a|||||r|||| 00| 0 | ||
| 007 | ta | ||
| 008 | 220909b |||||||| |||| 00| 0 eng d | ||
| 020 | _a981253072X (pbk) | ||
| 024 | _a76213 | ||
| 037 | _b1714, 20/02/2007, Unilib Book Distributors | ||
| 037 | _cTextual | ||
| 040 |
_aCSL _beng _cCSL |
||
| 041 | _aeng | ||
| 082 | _aC6:212, P4;1-;2 | ||
| 100 | _aMay Gary S | ||
| 245 | 0 |
_cby May Gary S; Sze Simon M _aFundamentals of semiconductor fabrication |
|
| 260 |
_aNew Jersey _bJohn Wiley & Sons, Inc, _c2004 |
||
| 300 |
_axiii, 305p. _ccm. |
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| 500 | _aIncludes bibliographical references.; Appendix A-L, 265-296p.; Index 297-305p. | ||
| 650 | _a Semiconductor fabrication | ||
| 650 | _a Semiconductor physics | ||
| 650 | _aPhysics | ||
| 700 | _a Sze Simon M | ||
| 942 |
_hC6:212, P4;1-;2 _cTEXL _2CC |
||
| 999 |
_c23526 _d23526 |
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