000 00807nam a2200265Ia 4500
003 OSt
005 20220912145200.0
006 a|||||r|||| 00| 0
007 ta
008 220909b |||||||| |||| 00| 0 eng d
024 _a75621
037 _cTextbook
040 _aCSL
_beng
_cCSL
041 _aeng
082 _aC6:212p1,N76, L7
100 _aChernow Fred Ed.
111 _aInternational conference on ion implantation in semiconductors (1976 : Boulder)
245 0 _cby Chernow Fred Ed.; Borders James A Ed.
_aProceeding on Ion implantation in semiconductors
260 _aNew York
_bPlenum Press
_c1977
300 _axiv,754p.
_ccm.
650 _aSemiconductors
700 _a Borders James A Ed.
942 _hC6:212p1,N76, L7
_cTB
_2CC
999 _c25263
_d25263