| 000 | 00807nam a2200265Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20220912145200.0 | ||
| 006 | a|||||r|||| 00| 0 | ||
| 007 | ta | ||
| 008 | 220909b |||||||| |||| 00| 0 eng d | ||
| 024 | _a75621 | ||
| 037 | _cTextbook | ||
| 040 |
_aCSL _beng _cCSL |
||
| 041 | _aeng | ||
| 082 | _aC6:212p1,N76, L7 | ||
| 100 | _aChernow Fred Ed. | ||
| 111 | _aInternational conference on ion implantation in semiconductors (1976 : Boulder) | ||
| 245 | 0 |
_cby Chernow Fred Ed.; Borders James A Ed. _aProceeding on Ion implantation in semiconductors |
|
| 260 |
_aNew York _bPlenum Press _c1977 |
||
| 300 |
_axiv,754p. _ccm. |
||
| 650 | _aSemiconductors | ||
| 700 | _a Borders James A Ed. | ||
| 942 |
_hC6:212p1,N76, L7 _cTB _2CC |
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| 999 |
_c25263 _d25263 |
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