000 01131nam a2200349Ia 4500
003 OSt
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006 a|||||r|||| 00| 0
007 ta
008 220909b |||||||| |||| 00| 0 eng d
020 _a047186109X (hbd)
024 _a67739
037 _b211, 24/11/2006, Ashutosh Technical Books
037 _cTextual
040 _aCSL
_beng
_cCSL
041 _aeng
082 _aD65,3, P1-;1
100 _aGardner Julian W
245 0 _cby Gardner Julian W; Varadan Vijay K; Awadelkarim Osama O
_aMicrosensors, MEMS, and smart devices
260 _aChichester John Wiley & Sons,Ltd
_c2001
300 _axvi, 503p.
_ccm.
500 _aIncludes bibliographical references.; Appendix A-M, 445-491p.; Index 493-503p.
650 _a Detectors
650 _a Electronic materials
650 _a Intelligent control systems
650 _a Microelectromechanical systems
650 _aComputer science
700 _a Awadelkarim Osama O
700 _a Varadan Vijay K
942 _hD65,3, P1-;1
_cTEXL
_2CC
999 _c27013
_d27013