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| 037 | _cTextual | ||
| 040 |
_aCSL _beng _cCSL |
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| 041 | _aeng | ||
| 082 | _aD65,4,T, L0 | ||
| 100 | _aMayer James W | ||
| 245 | 0 |
_cMayer James W; Eriksson L; Davies J A _aIon implantation in semiconductors: silicon and germanium |
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| 260 |
_aNew York _b Academic Press _c1970 |
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| 300 |
_axiii, 280p. _ccm. |
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| 500 |
_aAppendix A.1-A.4, 250254p. _ccm. |
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| 700 | _a Davies J A | ||
| 700 | _a Eriksson L | ||
| 942 |
_hD65,4,T, L0 _cTEXL _2CC |
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| 999 |
_c52813 _d52813 |
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