000 | 00925nam a2200325Ia 4500 | ||
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003 | OSt | ||
005 | 20220912150830.0 | ||
006 | a|||||r|||| 00| 0 | ||
007 | ta | ||
008 | 220909b |||||||| |||| 00| 0 eng d | ||
020 | _a8181282027 (pbk) | ||
024 | _a13160 | ||
037 | _b714, 22/12/2004, Unilib Book Distributors | ||
037 | _cTextual | ||
040 |
_aCSL _beng _cCSL |
||
041 | _aeng | ||
082 | _aC21:(D), P3 | ||
100 | _aFujita H Ed. | ||
245 | 0 |
_cFujita H Ed. _aMicromachines as tools for nanotechnology |
|
260 |
_aBarlin _bSpringer-Verlag _c2003 |
||
300 |
_axii, 211p. _ccm. |
||
490 | _aMicrotechnology and mems | ||
500 | _aIncludes bibliographical references | ||
650 | _a Computer Science | ||
650 | _a Matter | ||
650 | _a Solid | ||
650 | _aPhysics | ||
942 |
_hC21:(D), P3 _cTEXL _2CC |
||
999 |
_c55776 _d55776 |