000 00925nam a2200325Ia 4500
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005 20220912150830.0
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007 ta
008 220909b |||||||| |||| 00| 0 eng d
020 _a8181282027 (pbk)
024 _a13160
037 _b714, 22/12/2004, Unilib Book Distributors
037 _cTextual
040 _aCSL
_beng
_cCSL
041 _aeng
082 _aC21:(D), P3
100 _aFujita H Ed.
245 0 _cFujita H Ed.
_aMicromachines as tools for nanotechnology
260 _aBarlin
_bSpringer-Verlag
_c2003
300 _axii, 211p.
_ccm.
490 _aMicrotechnology and mems
500 _aIncludes bibliographical references
650 _a Computer Science
650 _a Matter
650 _a Solid
650 _aPhysics
942 _hC21:(D), P3
_cTEXL
_2CC
999 _c55776
_d55776