000 00774nam a2200253Ia 4500
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005 20220928113008.0
006 a|||||r|||| 00| 0
007 ta
008 220927b |||||||| |||| 00| 0 eng d
020 _c13100.01
024 _a114612
037 _b184, 06/01/2012, Classic Book Service
_cTextual
040 _aSDCL
_cSDCL
_beng
041 _2eng
_aeng
082 _aG9X1, Q2.1-.3
100 _aMadou Marc J
_9431138
245 0 _cMadou Marc J
_aFundamentals of microfabrication and nanotechnology.3V.
250 _a3
260 _aBoca Raton
_b CRC Press
_c2012
300 _aV1-xiv,641p; V2-xiv,656p; V3-xiv,636p
_ccm.
942 _hG9X1, Q2.1-.3
_cTEXL
_2CC
999 _c747546
_d747546