| 000 | 00774nam a2200253Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20220928113008.0 | ||
| 006 | a|||||r|||| 00| 0 | ||
| 007 | ta | ||
| 008 | 220927b |||||||| |||| 00| 0 eng d | ||
| 020 | _c13100.01 | ||
| 024 | _a114612 | ||
| 037 | _b184, 06/01/2012, Classic Book Service _cTextual | ||
| 040 | _aSDCL _cSDCL _beng | ||
| 041 | _2eng _aeng | ||
| 082 | _aG9X1, Q2.1-.3 | ||
| 100 | _aMadou Marc J _9431138 | ||
| 245 | 0 | _cMadou Marc J _aFundamentals of microfabrication and nanotechnology.3V. | |
| 250 | _a3 | ||
| 260 | _aBoca Raton _b CRC Press _c2012 | ||
| 300 | _aV1-xiv,641p; V2-xiv,656p; V3-xiv,636p _ccm. | ||
| 942 | _hG9X1, Q2.1-.3 _cTEXL _2CC | ||
| 999 | _c747546 _d747546 | ||