| 000 | 00728nam a2200265Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20220912151805.0 | ||
| 006 | a|||||r|||| 00| 0 | ||
| 007 | ta | ||
| 008 | 220909b |||||||| |||| 00| 0 eng d | ||
| 024 | _a33136 | ||
| 037 | _cTextual | ||
| 040 |
_aCSL _beng _cCSL |
||
| 041 | _aeng | ||
| 082 | _aD6:9(C2:76), M4 | ||
| 100 | _aMadey Theodre E | ||
| 245 | 0 |
_cMadey Theodre E; Brown William C _aHistory of vacuum science and technology |
|
| 260 |
_aNew York _b American Institute of Physics _c1984 |
||
| 300 |
_a168p. _ccm. |
||
| 650 | _a Electronics | ||
| 650 | _aEngineering | ||
| 700 | _a Brown William C | ||
| 942 |
_hD6:9(C2:76), M4 _cTEXL _2CC |
||
| 999 |
_c75439 _d75439 |
||