| 000 | 00645nam a2200229Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20220928125317.0 | ||
| 006 | a|||||r|||| 00| 0 | ||
| 007 | ta | ||
| 008 | 220927b |||||||| |||| 00| 0 eng d | ||
| 024 | _a18686 | ||
| 037 | _cTextual | ||
| 040 |
_aSDCL _cSDCL _beng |
||
| 041 |
_2eng _aeng |
||
| 082 | _aD654414, P7 | ||
| 100 |
_aMack Chris _9469174 |
||
| 245 | 0 |
_cMack Chris _aFundamental principles of optical lithography _b The science of microfabrication |
|
| 260 |
_aEngland _bJohn Wiley _c2007 |
||
| 300 |
_axvii,515p. _ccm. |
||
| 942 |
_hD654414, P7 _cTEXL _2CC |
||
| 999 |
_c781850 _d781850 |
||