000 00539nam a2200217Ia 4500
003 OSt
005 20220928140639.0
006 a|||||r|||| 00| 0
007 ta
008 220927b |||||||| |||| 00| 0 eng d
024 _a10416
037 _cTextual
040 _aSDCL
_cSDCL
_beng
041 _2eng
_aeng
082 _aC214, M5
100 _aSze S M
_9391912
245 0 _cSze S M
_aSemiconductor devices
_b Physics and technology
260 _c1985
942 _hC214, M5
_cTEXL
_2CC
999 _c812932
_d812932