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003 OSt
005 20220928141754.0
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024 _a17580
037 _cTextual
040 _aSDCL
_cSDCL
_beng
041 _2eng
_aeng
082 _aD6515, M2
100 _aBrodie Ivor
_9502157
245 0 _cBrodie Ivor; Muray Julius J
_aPhysics of microfabrication.
260 _c1982
700 _a Muray Julius J
_9502158
942 _hD6515, M2
_cTEXL
_2CC
999 _c819901
_d819901