000 00625nam a2200265Ia 4500
003 OSt
005 20220912152707.0
006 a|||||r|||| 00| 0
007 ta
008 220909b |||||||| |||| 00| 0 eng d
024 _a37977
037 _cTextual
040 _aCSL
_beng
_cCSL
041 _aeng
082 _aC2:76, K5
100 _aDushman Saw
245 0 _cDushman Saw
_aScientific foundations of vacuum technique
250 _a2
260 _c1965
300 _ap.
_ccm.
650 _a Solid state physics
650 _aPhysics
942 _hC2:76, K5
_cTEXL
_2CC
999 _c90243
_d90243