000 00563nam a2200241Ia 4500
003 OSt
005 20220912152911.0
006 a|||||r|||| 00| 0
007 ta
008 220909b |||||||| |||| 00| 0 eng d
024 _a31689
037 _cTextual
040 _aCSL
_beng
_cCSL
041 _aeng
082 _aC6:142, L0
100 _aSharma B L
245 0 _cSharma B L
_aDiffusion in semiconductors
260 _c1970
300 _ap.
_ccm.
650 _aSemiconductors
942 _hC6:142, L0
_cTEXL
_2CC
999 _c93418
_d93418