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Reactive sputter deposition Depla D Ed.; Mahieu S Ed. Mahieu S Ed.

By: Contributor(s): Material type: TextTextLanguage: English Series: Springer series in materials science, 109Publication details: Berlin Springer 2008Description: xviii, 570p. cmISBN:
  • 9783540766629 (hbd)
Subject(s): DDC classification:
  • C211, P8 Carpa
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