Handbook of semiconductor manufacturing technology by Doering Robert Ed.; Nishi Yoshio Ed.

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Material type: Text

TextLanguage: English Publication details: Boca Raton CRC Pres 2008Edition: 2Description: Various pagination cmISBN:

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Item type	Current library	Home library	Call number	Status	Barcode
Reference	Central Science Library	Central Science Library	C6:212:(F)g P8 RR (Browse shelf(Opens below))	Not for loan	SL1382338

Includes bibliographical references.; Appendix A-D, A1-D8p.; Index I1-I26p.

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