Handbook of advanced plasma processing techniques ed by R J Shul and S J Pearton Shul R J Ed; Pearton S J Ed

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Material type: Text

TextLanguage: English Publication details: Berlin Springer-Verlag 2000Description: xvi,653pISBN:

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Item type	Current library	Home library	Call number	Status	Barcode
Textual	Central Science Library	Central Science Library	C9B581 P0 (Browse shelf(Opens below))	Available	SL1175724

Includes bibliographical references; Index 649-653p; ^n23/CSL/C/00-01/OTSG/539^d2001-01-30^mPurchase

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